JPS4940502A - - Google Patents
Info
- Publication number
- JPS4940502A JPS4940502A JP8265672A JP8265672A JPS4940502A JP S4940502 A JPS4940502 A JP S4940502A JP 8265672 A JP8265672 A JP 8265672A JP 8265672 A JP8265672 A JP 8265672A JP S4940502 A JPS4940502 A JP S4940502A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8265672A JPS5127524B2 (en]) | 1972-08-18 | 1972-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8265672A JPS5127524B2 (en]) | 1972-08-18 | 1972-08-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4940502A true JPS4940502A (en]) | 1974-04-16 |
| JPS5127524B2 JPS5127524B2 (en]) | 1976-08-13 |
Family
ID=13780463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8265672A Expired JPS5127524B2 (en]) | 1972-08-18 | 1972-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5127524B2 (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5176365U (en]) * | 1974-12-11 | 1976-06-16 | ||
| JPS60125090U (ja) * | 1984-01-30 | 1985-08-23 | 株式会社 プラズマシステム | 半導体ウエハ−の搬送装置 |
| JPS60125086U (ja) * | 1984-01-30 | 1985-08-23 | 株式会社 プラズマシステム | 半導体ウエハ−の搬送装置 |
| JPH0256951U (en]) * | 1988-10-18 | 1990-04-24 |
-
1972
- 1972-08-18 JP JP8265672A patent/JPS5127524B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5176365U (en]) * | 1974-12-11 | 1976-06-16 | ||
| JPS60125090U (ja) * | 1984-01-30 | 1985-08-23 | 株式会社 プラズマシステム | 半導体ウエハ−の搬送装置 |
| JPS60125086U (ja) * | 1984-01-30 | 1985-08-23 | 株式会社 プラズマシステム | 半導体ウエハ−の搬送装置 |
| JPH0256951U (en]) * | 1988-10-18 | 1990-04-24 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5127524B2 (en]) | 1976-08-13 |